SERVOPRO DF-750 ULTRA
The DF-750 ULTRA is the first choice in moisture analysis for the semiconductor industry
The DF-750 ULTRA is a trace/ultra-trace analyzer optimized to deliver industry-best moisture measurements in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.
- High stability TDL trace/ultra-trace measurements
- A no-compromise solution
- High reliability
The robust DF-750 ULTRA has low lifetime maintenance requirements and delivers zero-drift stability, greatly extending calibration intervals. This low cost- of-ownership combined with exceptional measurement performance means that the DF-750 ULTRA is the first-choice analytical solution for UHP gas quality checks.
Ultra-trace qualification of UHP electronic gases is essential for semiconductor fabrication. You need a moisture analyzer that can deliver high stability measurements with sensitive and consistent performance. An accurate and low LDL is a must, as is the need to easily store and recall data/calibration records. No matter what your requirements, you’ll want a moisture analyzer that can provide operational efficiencies. We don’t believe you should have to compromise.
The DF-750 ULTRA is designed to meet the exceptional gas purity standards demanded by semiconductor manufacturers worldwide. Utilizing leading-edge TDL sensing technology, housed in a robust and resilient Herriot Cell, the DF-750 ULTRA avoids moisture contact with optical sensing components. The result is an analyzer that delivers an ultra-sensitive, industry-leading 55ppt Lower Detection Limit, ideal for checking for minute levels of moisture in a wide range of UHP electronics grade gases, including N2, H2, He, Ar and O2. With data recorded and readily available through flexible storage and recall functions, the DF-750 ULTRA is the complete solution for UHP gas monitoring in 300mm semiconductor fabs.
The use of patented leading-edge TDL technology provides zero drift accuracy, reducing ongoing calibration requirements, while the use of this sensing principle also helps to reduce ongoing maintenance thanks to its non-depleting nature.
